منابع مشابه
Suppression of Stiction in MEMS
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS. Stiction failures require first a collapse force that brings the elastic member contact with the substrate followed by an i...
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The presliding displacement and stiction properties of friction models are investigated. It is found that existing single-state-variable friction models possess either stiction or presliding displacement. Next, those models with continuous states are interpreted as examples of Prandlt’s elasto-plastic material model. A class of general one-state models is derived that is stable, dissipative and...
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This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF meas...
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ژورنال
عنوان ژورنال: International Journal of Solids and Structures
سال: 2012
ISSN: 0020-7683
DOI: 10.1016/j.ijsolstr.2012.03.032